Open AccessLow-Temperature Bonding for Fabrication of Miniaturized Chemical Analysis Devices
Author(s) -
Haozhe Wang,
Robert S. Foote,
Stephen C. Jacobson,
J. Michael Ramsey
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996a.9
Subject(s) - fabrication , materials science , anodic bonding , composite material , adhesive , sodium silicate , optoelectronics , layer (electronics) , medicine , alternative medicine , pathology
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