Open AccessHigh-Precision Silicon Micromachined Micromirrors for Laser Beam Scanning and Positioning
Author(s) -
MengHsiung Kiang,
Olav Solgaard,
R.S. Muller,
Kam Y. Lau
Publication year - 1996
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996a.17
Subject(s) - silicon , materials science , surface micromachining , laser beams , laser , optoelectronics , optics , hybrid silicon laser , beam (structure) , fabrication , physics , pathology , medicine , alternative medicine