Open AccessHigh-Precision Silicon Micromachined Micromirrors for Laser Beam Scanning and Positioning
Author(s) -
Meng-Hsiung Kiang,
Olav Solgaard,
R.S. Muller,
Kam Y. Lau
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996a.17
Subject(s) - materials science , holography , surface micromachining , fabrication , optics , silicon , optoelectronics , laser , laser beams , bulk micromachining , beam (structure) , 3d optical data storage , physics , medicine , alternative medicine , pathology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom