Open AccessHexsil Tweezers with Piezoresistive Polysilicon Strain Gages
Author(s) -
Chris G. Keller,
Roger T. Howe
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996a.16
Subject(s) - piezoresistive effect , tweezers , materials science , strain gauge , actuator , optoelectronics , optical tweezers , composite material , electrical engineering , optics , engineering , physics
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