Open AccessAn Integrated Accelerometer as a Demostration of a New Technology Using Silicon Fusion Bonding and Deep Ractive-Ion Etching
Author(s) -
N.I. Maluf,
Jaidah Mohan,
K. Petersen,
G.T.A. Kovacs
Publication year - 1996
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996a.11
Subject(s) - etching (microfabrication) , accelerometer , silicon , deep reactive ion etching , materials science , fusion , ion , optoelectronics , computer science , reactive ion etching , electronic engineering , nanotechnology , engineering , chemistry , operating system , linguistics , philosophy , organic chemistry , layer (electronics)