Open AccessMedia Compatible Packaging and Environmental Testing of Barrier Coasting Encapsulated Silicon Pressure Sensors
Author(s) -
David J. Monk,
Theresa Maudie,
D. Stanerson,
J. Wertz,
G. Bitko,
J. Matkin,
Slobodan Petrović
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.9
Subject(s) - parylene , materials science , coating , corrosion , aqueous solution , composite material , silicon , pressure sensor , polymer , cathodic protection , voltage , ambient pressure , electrode , metallurgy , chemistry , electrical engineering , mechanical engineering , electrochemistry , physics , engineering , thermodynamics
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