Open AccessMicromachined Dual Input Axis Angular Rate Sensor
Author(s) -
T. Juneau,
A.P. Pisano
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.67
Subject(s) - angular velocity , bandwidth (computing) , physics , angular displacement , acoustics , resonance (particle physics) , angular acceleration , optics , materials science , computer science , telecommunications , atomic physics , quantum mechanics
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