Silicon Bulk Micromachined Vibratory Gyroscope | Zendy

Tony K. Tang | Zendy; R.C. Gutierrez | Zendy; J. Z. Wilcox | Zendy; Christopher Stell | Zendy; V. Vorperian | Zendy; Robert J. Calvet | Zendy; Wenhan Li | Zendy; Indrani Charkaborty | Zendy; William J. Kaiser | Zendy; Randall K. Bartman | Zendy

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Silicon Bulk Micromachined Vibratory Gyroscope

Author(s) -

Tony K. Tang,

R.C. Gutierrez,

J. Z. Wilcox,

Christopher Stell,

V. Vorperian,

Robert J. Calvet,

Wenhan Li,

Indrani Charkaborty,

William J. Kaiser,

Randall K. Bartman

Publication year - 1996

Publication title -

1998 solid-state, actuators, and microsystems workshop technical digest

Language(s) - Uncategorized

Resource type - Conference proceedings

DOI - 10.31438/trf.hh1996.65

Subject(s) - gyroscope , fabrication , rotation (mathematics) , microelectromechanical systems , noise (video) , silicon , materials science , surface micromachining , bulk micromachining , optoelectronics , vibrating structure gyroscope , scale factor (cosmology) , sensitivity (control systems) , cantilever , acoustics , electronic engineering , computer science , physics , engineering , aerospace engineering , alternative medicine , pathology , medicine , artificial intelligence , image (mathematics) , metric expansion of space , dark energy , composite material , cosmology , quantum mechanics

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