Open AccessSilicon Bulk Micromachined Vibratory Gyroscope
Author(s) -
Tony K. Tang,
Roman C. Gutierrez,
J. Z. Wilcox,
Christopher B. Stell,
V. Vorpérian,
Robert J. Calvet,
W. J. Li,
Indrani Charkaborty,
Randall K. Bartman,
William J. Kaiser
Publication year - 1996
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.65
Subject(s) - gyroscope , silicon , surface micromachining , materials science , computer science , optoelectronics , acoustics , electrical engineering , electronic engineering , engineering , physics , aerospace engineering , fabrication , medicine , alternative medicine , pathology