Open AccessSurface Micromachined Z-Axis Vibratory Rate Gyroscope
Author(s) -
W. Crawford Clark,
Roberto Horowitz,
Roger T. Howe
Publication year - 1996
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.64
Subject(s) - gyroscope , vibrating structure gyroscope , surface micromachining , surface (topology) , materials science , acoustics , physics , geometry , mathematics , medicine , alternative medicine , pathology , fabrication , quantum mechanics