Surface Micromachined Z-Axis Vibratory Rate Gyroscope | Zendy

William Clark | Zendy; Roberto Horowitz | Zendy; Roger T. Howe | Zendy

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Surface Micromachined Z-Axis Vibratory Rate Gyroscope

Author(s) -

William Clark,

Roberto Horowitz,

Roger T. Howe

Publication year - 1996

Publication title -

1998 solid-state, actuators, and microsystems workshop technical digest

Language(s) - Uncategorized

Resource type - Conference proceedings

DOI - 10.31438/trf.hh1996.64

Subject(s) - gyroscope , surface micromachining , voltage , sensitivity (control systems) , bulk micromachining , perpendicular , physics , vibrating structure gyroscope , rotation (mathematics) , signal (programming language) , sense (electronics) , silicon , chip , comb drive , silicon chip , acoustics , materials science , optoelectronics , electrical engineering , electronic engineering , computer science , engineering , fabrication , mathematics , medicine , alternative medicine , geometry , pathology , quantum mechanics , artificial intelligence , programming language

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