Open AccessMicromachined Acoustic-Wave Liquid Ejectro
Author(s) -
Xu Zhu,
E Tran,
W. Wang,
E.S. Kim,
S.Y. Lee
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.63
Subject(s) - wafer , injector , materials science , microfluidics , surface acoustic wave , acoustic wave , inkwell , piezoelectricity , acoustics , silicon , optoelectronics , surface micromachining , optics , nanotechnology , fabrication , mechanical engineering , composite material , engineering , physics , medicine , alternative medicine , pathology
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