Open AccessUltrasonically Driven Silicon Atomizer and Pump
Author(s) -
Amit Lal,
R.M. White
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.62
Subject(s) - mist , materials science , transducer , silicon , lead zirconate titanate , piezoelectricity , drop (telecommunication) , microelectromechanical systems , acoustics , combustion , pressure sensor , optoelectronics , composite material , chemistry , ferroelectricity , electrical engineering , mechanical engineering , physics , organic chemistry , meteorology , dielectric , engineering
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