Open AccessHigh-Density Arrays of Valves and Interconnects for Liquid Switching
Author(s) -
Luc Bousse,
E. Dijkstra,
Olivier T. Guenat
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.61
Subject(s) - silicone rubber , materials science , elastomer , photoresist , fabrication , body orifice , flow (mathematics) , optoelectronics , process (computing) , flow control valve , composite material , mechanical engineering , computer science , mechanics , medicine , alternative medicine , physics , pathology , layer (electronics) , engineering , operating system
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