Open AccessA High-Yield Process for Three-Dimensional Microelectrode Arrays
Author(s) -
Qing Bai
Publication year - 1996
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.59
Subject(s) - microelectrode , process (computing) , yield (engineering) , computer science , materials science , electrode , physics , programming language , metallurgy , quantum mechanics