Open AccessMicromachining and Microgenetics: What Are They and Where Do They Work Together?
Author(s) -
Michael Albin,
R. Kowallis,
E. Picozza,
Y. Raysberg,
Courtney Sloan,
E. Winn-Deen,
T. Woudenberg,
J. Zupfer
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.57
Subject(s) - temperature cycling , surface micromachining , silicon , throughput , materials science , sample (material) , computer science , work (physics) , nanotechnology , optoelectronics , chemistry , mechanical engineering , engineering , chromatography , fabrication , telecommunications , physics , medicine , alternative medicine , pathology , thermal , meteorology , wireless
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