Open AccessA Micromachined Silicon Condenser Microphone with On-Chip Amplifier
Author(s) -
Jonathan Bernstein,
Jeffrey T. Borenstein
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.54
Subject(s) - surface micromachining , materials science , amplifier , bulk micromachining , resistor , microphone , optoelectronics , electrical engineering , chip , jfet , fabrication , cmos , transistor , engineering , field effect transistor , voltage , medicine , alternative medicine , pathology , loudspeaker
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