Open AccessA Micromachined Silicon Condenser Microphone with On-Chip Amplifier
Author(s) -
J. Bernstein,
Jeffrey T. Borenstein
Publication year - 1996
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.54
Subject(s) - silicon , amplifier , surface micromachining , chip , condenser (optics) , silicon chip , materials science , microphone , electrical engineering , electronic engineering , computer science , optoelectronics , engineering , physics , cmos , fabrication , optics , loudspeaker , medicine , light source , alternative medicine , pathology