Open AccessA Fully Integrated Magnetically Actuated Micromachined Relay
Author(s) -
W.P. Taylor,
C.R. Duawalter,
Mark G. Allen
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.52
Subject(s) - electromagnetic coil , materials science , surface micromachining , relay , dissipation , electrical engineering , contact resistance , optoelectronics , power (physics) , fabrication , composite material , engineering , physics , medicine , alternative medicine , pathology , quantum mechanics , layer (electronics) , thermodynamics
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