Open AccessA Fully Integrated Magnetically Actuated Micromachined Relay
Author(s) -
W.P. Taylor,
C.R. Duawalter,
Mark G. Allen
Publication year - 1996
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.52
Subject(s) - relay , surface micromachining , computer science , physics , fabrication , power (physics) , quantum mechanics , medicine , alternative medicine , pathology