Open AccessUltrasensitive Vertical Force Probe for Magnetic Resonance Force Microscopy
Author(s) -
T. D. Stowe,
Kevin Yasumura,
D. Botkin,
K. Wago,
D. Rugar,
Thomas W. Kenny
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.51
Subject(s) - cantilever , silicon nitride , materials science , silicon , resonator , wafer , magnetic force microscope , magnetic resonance force microscopy , non contact atomic force microscopy , optoelectronics , silicon on insulator , torr , conductive atomic force microscopy , atomic force microscopy , nanotechnology , magnetic field , composite material , ferromagnetic resonance , physics , magnetization , quantum mechanics , thermodynamics
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