Open AccessPiezoelectrically Actuated Microcantilever for Actuated Mirror Array Application
Author(s) -
Yulei Huang,
Hui Zhang,
Sung-Ho Kim,
Yong Bae Jeon,
Eun Soo Kim
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.44
Subject(s) - cantilever , fabrication , materials science , deflection (physics) , optoelectronics , piezoelectricity , actuator , etching (microfabrication) , microelectromechanical systems , optics , nanotechnology , composite material , electrical engineering , engineering , physics , medicine , alternative medicine , pathology , layer (electronics)
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom