Open AccessPiezoelectrically Actuated Microcantilever for Actuated Mirror Array Application
Author(s) -
Yongli Huang,
Hong Zhang,
Eun Sok,
Ki Wook Kim,
Sung Hoon Kim,
Yong Bae Jeon,
Eun Sok Kim
Publication year - 1996
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.44
Subject(s) - microelectromechanical systems , deformable mirror , materials science , computer science , adaptive optics , optoelectronics , optics , acoustics , physics