Open AccessMonolithic Geared-Mechanism Driven by a Polysilicon Surface-MicroMachined On-Chip Electrostatic Microengine
Author(s) -
J.J. Sniegowski,
S. L. Miller,
Glen LaVigne,
M.S. Rodgers,
P.J. McWorter
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.41
Subject(s) - torque , surface micromachining , comb drive , non circular gear , coupling (piping) , reduction (mathematics) , mechanism (biology) , materials science , automotive engineering , mechanical engineering , computer science , spiral bevel gear , engineering , fabrication , physics , medicine , alternative medicine , geometry , mathematics , pathology , quantum mechanics , thermodynamics
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