Open AccessSurface Micromachined Polysilicon Theraml Actuator Arrays and Applications
Author(s) -
John H. Comtois,
Victor M. Bright
Publication year - 1996
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.40
Subject(s) - actuator , surface micromachining , materials science , surface (topology) , optoelectronics , microelectromechanical systems , electronic engineering , electrical engineering , engineering , fabrication , medicine , alternative medicine , geometry , mathematics , pathology