Open AccessSurface Micromachined Polysilicon Theraml Actuator Arrays and Applications
Author(s) -
John H. Comtois,
Victor M. Bright
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.40
Subject(s) - actuator , grippers , surface micromachining , block (permutation group theory) , thermal , microelectromechanical systems , component (thermodynamics) , stepper , materials science , mechanical engineering , electronic engineering , electrical engineering , optoelectronics , engineering , nanotechnology , fabrication , physics , medicine , alternative medicine , geometry , mathematics , pathology , meteorology , thermodynamics
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom