Open AccessCombined Organic Thermal and Electrostatic Omnidirectonal Ciliary Microactuator Array for Object Positioning and Inspection
Author(s) -
J.W. Suh,
Steven F Glander,
Robert B. Darling,
C.W. Storment,
G.T.A. Kovacs
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.39
Subject(s) - microactuator , object (grammar) , thermal , computer vision , computer science , materials science , artificial intelligence , acoustics , physics , actuator , meteorology
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