Open AccessLateral In-Plane Displacement Microactuators with Combined Thermal and Electrostatic Drive
Author(s) -
Xuan Sun,
Xiang Lin Gu,
W.N. Carr
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.36
Subject(s) - bimorph , cantilever , actuator , materials science , voltage , volt , displacement (psychology) , microactuator , thermal , optoelectronics , power (physics) , electrostatics , microelectromechanical systems , electrical engineering , engineering , physics , composite material , psychology , meteorology , psychotherapist , quantum mechanics
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