Open AccessLateral In-Plane Displacement Microactuators with Combined Thermal and Electrostatic Drive
Author(s) -
Xuan Sun,
Xiang Lin Gu,
W.N. Carr
Publication year - 1996
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.36
Subject(s) - displacement (psychology) , thermal , plane (geometry) , materials science , structural engineering , physics , engineering , geometry , mathematics , psychology , psychotherapist , meteorology