Open AccessAn Electrostatically-Actuated Microvalve for Semiconductor Gas Flow Control
Author(s) -
J.K. Robertson,
K.D. Wise
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.35
Subject(s) - volumetric flow rate , flow control (data) , materials science , voltage , control valves , flow (mathematics) , semiconductor device fabrication , controller (irrigation) , differential pressure , process (computing) , pulse width modulation , pneumatic flow control , mechanical engineering , optoelectronics , control theory (sociology) , mechanics , electrical engineering , engineering , computer science , physics , control (management) , telecommunications , agronomy , artificial intelligence , wafer , biology , operating system
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