Open AccessAn Electrostatically-Actuated Microvalve for Semiconductor Gas Flow Control
Author(s) -
J.K. Robertson,
K. D. Wise
Publication year - 1996
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.35
Subject(s) - flow control (data) , semiconductor , materials science , flow (mathematics) , optoelectronics , computer science , mechanics , physics , telecommunications