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Microscale Pumping with Traversing Bubbles in Microchannels
Author(s) -
Thomas K. Jun,
C.J. Kim
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.34
Subject(s) - microscale chemistry , materials science , bubble , wafer , surface tension , surface micromachining , traverse , silicon , mechanics , optoelectronics , thermodynamics , physics , mathematics education , mathematics , geodesy , medicine , alternative medicine , pathology , fabrication , geography

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