Open AccessSurface-Micromachined Beams Without Spring Effect of Anchor Step-Up
Author(s) -
Linh Van Ngo,
Phyllis Nelson,
C.J. Kim
Publication year - 1996
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.33
Subject(s) - spring (device) , surface micromachining , surface (topology) , materials science , structural engineering , engineering , geometry , fabrication , mathematics , medicine , alternative medicine , pathology