Open AccessSurface-Micromachined Beams Without Spring Effect of Anchor Step-Up
Author(s) -
Ngo Van Linh,
Phyllis R. Nelson,
C.J. Kim
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.33
Subject(s) - spring (device) , surface micromachining , materials science , beam (structure) , interferometry , finite element method , coil spring , structural engineering , surface (topology) , laser beams , optics , laser , electronic engineering , engineering , fabrication , physics , geometry , mathematics , medicine , alternative medicine , pathology
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