Open AccessMicromachined Thermally Isolated Circuits
Author(s) -
R. Klaassen,
R.J. Reay,
C.W. Storment,
Jonathan Audy,
Paul K. Henry,
A.P. Brokaw,
G.T.A. Kovas
Publication year - 1996
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.30
Subject(s) - electronic circuit , materials science , optoelectronics , computer science , electrical engineering , engineering