Open AccessMicromachined Thermally Isolated Circuits
Author(s) -
R.H. Klaassen,
R.J. Reay,
C.W. Storment,
Jonathan Audy,
Paul K. Henry,
Amy Brokaw,
G.T.A. Kovas
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.30
Subject(s) - surface micromachining , materials science , etching (microfabrication) , silicon , electronic circuit , ammonium hydroxide , bulk micromachining , integrated circuit , substrate (aquarium) , hillock , microelectromechanical systems , optoelectronics , biasing , electronic engineering , nanotechnology , electrical engineering , voltage , fabrication , engineering , medicine , oceanography , alternative medicine , pathology , layer (electronics) , chemical engineering , geology , composite material
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom