Open AccessCharacteristics of a Polyimide Microvalve
Author(s) -
Y. C. Lin,
Peter J. Hesketh,
Susan M. Lunte,
Graeme Wilson,
Jack Boyd
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.27
Subject(s) - micropump , wafer , polyimide , materials science , silicon , optoelectronics , nanotechnology , electronic engineering , engineering , layer (electronics)
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom