Open AccessLinear Vibromotor-Actuated Micromachined Microreflector for Integrated Optical Systems
Author(s) -
M. Daneman,
N.C. Tien,
Olav Solgaard,
K.Y. Lau,
René Müller
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.26
Subject(s) - coupling (piping) , surface micromachining , beam steering , range (aeronautics) , degrees of freedom (physics and chemistry) , optics , physics , beam (structure) , computer science , materials science , engineering , mechanical engineering , aerospace engineering , fabrication , medicine , alternative medicine , pathology , quantum mechanics
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