Open AccessLinear Vibromotor-Actuated Micromachined Microreflector for Integrated Optical Systems
Author(s) -
M. Daneman,
Norman C. Tien,
Olav Solgaard,
K.Y. Lau,
Raluca Müller
Publication year - 1996
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.26
Subject(s) - surface micromachining , computer science , fabrication , medicine , pathology , alternative medicine