Open AccessA Bi-Directional Magnetic Micropump on a Silicon Wafer
Author(s) -
W. Zhang,
Chong H. Ahn
Publication year - 1996
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.22
Subject(s) - micropump , wafer , silicon , materials science , optoelectronics , electrical engineering , computer science , nanotechnology , engineering