Open AccessA Bi-Directional Magnetic Micropump on a Silicon Wafer
Author(s) -
W. Zhang,
Chang-Geun Ahn
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.22
Subject(s) - micropump , wafer , materials science , microelectromechanical systems , silicon , optoelectronics , electromagnet , fabrication , voltage , wafer level packaging , magnetic field , electrical engineering , magnet , nanotechnology , engineering , physics , medicine , alternative medicine , pathology , quantum mechanics
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