Open AccessNumerical Simulation of Compressible Squeezed-Film Damping
Author(s) -
YaoJoe Yang,
S.D. Senturia
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.18
Subject(s) - compressibility , amplitude , nonlinear system , physics , finite element method , mechanics , lubrication , equations of motion , classical mechanics , optics , thermodynamics , quantum mechanics
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