Open AccessMiniaturized Spectrometers for Biochemical Analysis
Author(s) -
Gaylin M. Yee,
Paul A. Hing,
N.I. Maluf,
G.T.A. Kovacs
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.15
Subject(s) - spectrometer , optics , diffraction grating , diffraction , spectral resolution , materials science , surface micromachining , grating , dispersion (optics) , diffraction efficiency , wavelength , optoelectronics , spectral line , physics , fabrication , medicine , alternative medicine , pathology , astronomy
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