Open AccessThe Nanoscilloscope Combined Topography and AC Field Probing with a Micromachined Tip
Author(s) -
Daniel W. van der Weide,
Pavel Neužil
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.13
Subject(s) - surface micromachining , fabrication , coaxial , silicon , materials science , field (mathematics) , scale (ratio) , optoelectronics , electrical engineering , physics , engineering , medicine , alternative medicine , mathematics , pathology , pure mathematics , quantum mechanics
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