Application of Chemical-Mechanical Polishing to Planarization of Surface-Micromachined Devices | Zendy

R.D. Nasby | Zendy; J.J. Sniegowski | Zendy; James H. Smith | Zendy; Stephen Montague | Zendy; C.C. Barron | Zendy; William P. Eaton | Zendy; Dale L. Hetherington | Zendy; Christopher A. Apblett | Zendy; J. G. Fleming | Zendy; P. J. McWhorter | Zendy

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Application of Chemical-Mechanical Polishing to Planarization of Surface-Micromachined Devices

Author(s) -

R.D. Nasby,

J.J. Sniegowski,

James H. Smith,

Stephen Montague,

C.C. Barron,

William P. Eaton,

Dale L. Hetherington,

Christopher A. Apblett,

J. G. Fleming,

P. J. McWhorter

Publication year - 1996

Publication title -

1998 solid-state, actuators, and microsystems workshop technical digest

Language(s) - English

Resource type - Conference proceedings

DOI - 10.31438/trf.hh1996.11

Subject(s) - chemical mechanical planarization , microelectromechanical systems , microelectronics , polishing , fabrication , surface micromachining , materials science , integrated circuit , electronic circuit , planar , electronic engineering , computer science , nanotechnology , optoelectronics , electrical engineering , engineering , composite material , medicine , alternative medicine , computer graphics (images) , pathology

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