Open AccessSelf-Assembled Monlayer Films as Durable Anti-Stiction Coating for Polysilicon Microstructures
Author(s) -
M.R. Houston,
Roya Maboudian,
Roger T. Howe
Publication year - 1996
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.10
Subject(s) - stiction , materials science , microstructure , coating , composite material , silicon , optoelectronics , microelectromechanical systems