Open AccessSelf-Assembled Monlayer Films as Durable Anti-Stiction Coating for Polysilicon Microstructures
Author(s) -
M.R. Houston,
Roya Maboudian,
Roger T. Howe
Publication year - 1996
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1996.10
Subject(s) - stiction , materials science , coating , composite material , microstructure , chemical engineering , nanotechnology , microelectromechanical systems , engineering
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