Open AccessMICROMINIATURE FLUIDIC AMPLIFIER
Author(s) -
M.J. Zdeblick,
P.W. Barth,
James B. Angell
Publication year - 1986
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.6
Subject(s) - fluidics , surface micromachining , amplifier , materials science , electronics , actuator , electrical engineering , electronic circuit , transducer , integrated circuit , optoelectronics , engineering , fabrication , cmos , medicine , alternative medicine , pathology
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