Open AccessA MICROMACHINED MANIPULATOR FOR SUBMICRON POSITIONING OF OPTICAL FIBERS
Author(s) -
A.M. Feury,
T.L. Poteat,
William S. Trimmer
Publication year - 1986
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.5
Subject(s) - micromanipulator , wafer , surface micromachining , silicon , materials science , deep reactive ion etching , angstrom , position (finance) , optoelectronics , piezoelectricity , bulk micromachining , fabrication , optics , electronic engineering , computer science , engineering , nanotechnology , physics , etching (microfabrication) , reactive ion etching , alternative medicine , artificial intelligence , pathology , medicine , chemistry , composite material , layer (electronics) , finance , economics , crystallography
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