Open AccessTHE USE OF MICROMACHINED STRUCTURES FOR THE MEASUREMENT OF MECHANICAL PROPERTIES AND ADHESION OF THIN FILMS
Author(s) -
Mehran Mehregany,
M.G. Allen,
S.D. Senturia
Publication year - 1986
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.41
Subject(s) - materials science , adhesion , surface micromachining , thin film , composite material , optoelectronics , nanotechnology , fabrication , medicine , alternative medicine , pathology
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