Open AccessTIN OXIDE MICROSENSROS ON THIN SILICON MEMBRANES
Author(s) -
S. C. Chang,
David B. Hicks
Publication year - 1986
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.39
Subject(s) - materials science , tin oxide , tin , membrane , sputtering , silicon , thin film , etching (microfabrication) , oxide , chemical vapor deposition , deposition (geology) , silicon oxide , optoelectronics , chemical engineering , nanotechnology , metallurgy , chemistry , layer (electronics) , silicon nitride , biochemistry , paleontology , sediment , engineering , biology
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