Open AccessTIN OXIDE MICROSENSROS ON THIN SILICON MEMBRANES
Author(s) -
Shinan Chang,
David Hicks
Publication year - 1986
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.39
Subject(s) - tin , silicon , membrane , materials science , tin oxide , optoelectronics , oxide , metallurgy , chemistry , biochemistry