Open AccessZINC-OXIDE THIN FILMS FOR INTERGRATED-SENSOR APPLICATIONS
Author(s) -
D.L. Polla,
R.S. Muller
Publication year - 1986
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.38
Subject(s) - pyroelectricity , materials science , piezoelectricity , zinc , thin film , sputter deposition , planar , optoelectronics , piezoelectric coefficient , sputtering , voltage , oxide , composite material , electrical engineering , nanotechnology , metallurgy , computer science , ferroelectricity , engineering , computer graphics (images) , dielectric
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