Open AccessRESONANT STRUCTURES FOR INTEGRATED SENSORS
Author(s) -
Michael A. Schmidt,
Roger T. Howe
Publication year - 1986
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.35
Subject(s) - resonance (particle physics) , rayleigh scattering , materials science , class (philosophy) , electronic engineering , optoelectronics , computer science , physics , engineering , atomic physics , optics , artificial intelligence
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