Open AccessSIMULATION OF DIAPHRAGM-TYPE IC PRESSURE SENSORS
Author(s) -
H. Reimann,
Y. Fathi
Publication year - 1986
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.29
Subject(s) - diaphragm (acoustics) , pressure sensor , type (biology) , computer science , materials science , acoustics , engineering , electrical engineering , mechanical engineering , geology , physics , loudspeaker , paleontology
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