Open AccessAIR-LOADING EFFECTS ON A CAPACITIVELY SENSED, MAMBRANE-SUPPORTED SILICON ACCELEROMETER
Author(s) -
S.P. McArthur,
James W. HolmKennedy
Publication year - 1986
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.28
Subject(s) - accelerometer , silicon , acceleration , optoelectronics , materials science , proof mass , stiffness , sensitivity (control systems) , electrical engineering , acoustics , microelectromechanical systems , electronic engineering , engineering , composite material , computer science , physics , operating system , classical mechanics
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