Open AccessAIR-LOADING EFFECTS ON A CAPACITIVELY SENSED, MAMBRANE-SUPPORTED SILICON ACCELEROMETER
Author(s) -
S.P. McArthur,
James W. Holm−Kennedy
Publication year - 1986
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.28
Subject(s) - accelerometer , silicon , materials science , computer science , optoelectronics , operating system