Open AccessTHE RESPONSE OF MOS SENSORS WITH UTLRATHIN PALLADIUM GATES TO CARBON MONXIDE AND HYDROGEN
Author(s) -
G. Jordan Maclay,
J.W. Jelley
Publication year - 1986
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.27
Subject(s) - capacitance , materials science , palladium , substrate (aquarium) , hydrogen , optoelectronics , sensitivity (control systems) , logic gate , carbon fibers , electrical engineering , electronic engineering , chemistry , electrode , engineering , composite material , composite number , organic chemistry , catalysis , biochemistry , oceanography , geology
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