Open AccessAN INTEGRATED ON-CHIP PRESSURE SENSOR FOR ACCURATE CONTROL APPLICATIONS
Author(s) -
Joseph M. Staller,
William S. Cumberledge
Publication year - 1986
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.22
Subject(s) - microprocessor , reliability (semiconductor) , pressure sensor , computer science , chip , embedded system , state (computer science) , control (management) , engineering , reliability engineering , electrical engineering , mechanical engineering , power (physics) , physics , algorithm , quantum mechanics , artificial intelligence
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