Open AccessAPPLICATION-SPECIFIC PACKAGING FOR CUSTOM MICROMECHANICAL STRUCTURES
Author(s) -
S.C. Terry,
J.H. Jerman,
James W. Knutti,
Henry V. Allen
Publication year - 1986
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.20
Subject(s) - computer science , electronic packaging , materials science , composite material