Open AccessAPPLICATION-SPECIFIC PACKAGING FOR CUSTOM MICROMECHANICAL STRUCTURES
Author(s) -
S. Terry,
J.H. Jerman,
James W. Knutti,
Henry V. Allen
Publication year - 1986
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.20
Subject(s) - electronic packaging , computer science , engineering drawing , materials science , engineering , composite material
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