Open AccessDESIGN AND CONSTRUCTION TECHNIQUES FOR PLANAR POLYSILICON PRESSURE TRANSDUCERS WITHPIEZORESISTIVE READ-OUT
Author(s) -
H. Guckel,
D.W. Burns,
C.R. Rutigliano
Publication year - 1986
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.2
Subject(s) - planar , transducer , materials science , pressure sensor , computer science , electrical engineering , electronic engineering , optoelectronics , acoustics , engineering , mechanical engineering , computer graphics (images) , physics