Open AccessDESIGN AND CONSTRUCTION TECHNIQUES FOR PLANAR POLYSILICON PRESSURE TRANSDUCERS WITHPIEZORESISTIVE READ-OUT
Author(s) -
H. Guckel,
D.W. Burns,
C.R. Rutigliano
Publication year - 1986
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.2
Subject(s) - materials science , silicon nitride , planar , fabrication , optoelectronics , piezoresistive effect , microelectromechanical systems , silicon , nitride , dielectric , pressure sensor , polysilicon depletion effect , diaphragm (acoustics) , layer (electronics) , electronic engineering , electrical engineering , transistor , composite material , computer science , mechanical engineering , engineering , gate oxide , voltage , computer graphics (images) , medicine , alternative medicine , pathology , loudspeaker
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