Open AccessCHARACTERISICS OF POLYSILICON LAYERS AND THEIR APPLICATIONS IN SENSORS
Author(s) -
Ε. Obermeier,
P. Kopystynski,
R. Niessl
Publication year - 1986
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh1986.1
Subject(s) - polysilicon depletion effect , computer science , materials science , optoelectronics , engineering physics , electrical engineering , engineering , transistor , voltage , gate oxide