Open AccessCharge-Induced Damage on SOI Wafers—A Case Study
Author(s) -
Mary Ann Miller,
Darlene M. Udoni
Publication year - 2017
Publication title -
proceedings - international symposium for testing and failure analysis
Language(s) - Uncategorized
Resource type - Conference proceedings
ISSN - 0890-1740
DOI - 10.31399/asm.cp.istfa2017p0131
Subject(s) - silicon on insulator , materials science , wafer , chemical mechanical planarization , transistor , optoelectronics , threshold voltage , voltage , integrated circuit , leakage (economics) , failure mechanism , silicon , electrical engineering , composite material , engineering , polishing , economics , macroeconomics
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom