Open AccessStructure and mechanical properties of Ti-Si-N coatings
Author(s) -
Xiaodong Zhang
Publication year - 2003
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_theses.699
Subject(s) - nanoindentation , materials science , rutherford backscattering spectrometry , scanning electron microscope , coating , raman spectroscopy , transmission electron microscopy , composite material , analytical chemistry (journal) , sputtering , microstructure , nanocomposite , phase (matter) , thin film , nanotechnology , optics , chemistry , physics , organic chemistry , chromatography
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