Open AccessStructure and mechanical properties of Ti-Si-N coatings
Author(s) -
Xiaodong Zhang
Publication year - 2022
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_theses.699
Subject(s) - nanoindentation , materials science , scanning electron microscope , rutherford backscattering spectrometry , coating , transmission electron microscopy , raman spectroscopy , composite material , analytical chemistry (journal) , sputtering , microstructure , phase (matter) , nanocomposite , thin film , nanotechnology , optics , chemistry , physics , organic chemistry , chromatography