Open AccessThe design and modification of a sputter system for DC reactive sputtering of alumina and zirconia thin films
Author(s) -
Diane Ho
Publication year - 2011
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_theses.550
Subject(s) - sputtering , materials science , cubic zirconia , zirconium , sputter deposition , thin film , yttria stabilized zirconia , amorphous solid , x ray photoelectron spectroscopy , substrate (aquarium) , layer (electronics) , cavity magnetron , metallurgy , chemical engineering , composite material , ceramic , nanotechnology , crystallography , chemistry , oceanography , geology , engineering
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