Open AccessThe design and modification of a sputter system for DC reactive sputtering of alumina and zirconia thin films
Author(s) -
Diane Ho
Publication year - 2022
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_theses.550
Subject(s) - sputtering , materials science , zirconium , cubic zirconia , sputter deposition , thin film , yttria stabilized zirconia , amorphous solid , x ray photoelectron spectroscopy , substrate (aquarium) , layer (electronics) , cavity magnetron , metallurgy , composite material , chemical engineering , ceramic , nanotechnology , crystallography , chemistry , oceanography , geology , engineering