Open AccessThin-film Block Copolymers (BCPs) Self-assembly as Versatile Patterning Scheme for Functional Nanomaterials
Author(s) -
Le Zhang
Publication year - 2022
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.31390/gradschool_theses.4804
Subject(s) - nanotechnology , photolithography , materials science , lithography , multiple patterning , computer science , resist , optoelectronics , layer (electronics)